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Stepper System Comparison

Azores steppers address the demanding requirements of the mobile display industry with systems featuring the highest resolution in the industry. Our proven stepper technology optimizes performance capabilities with superior cost-of-ownership in Gen 2 through 4.5 configurations.

  6700 System 9200 System
Imaging Specifications    
Lens Type 8010gh(i) / 160X1 20015i
Resolution 2.5 µm / 5.0 µm L/S 1.5µm L/S
Degrees of Freedom 6 DoF reticle chuck 6 DoF reticle chuck
Reduction Ratio 2x / 1x 1.25x
Image Field Diameter 80 mm / 160 mm 200 mm
Image Field Stitching Error <± 0.3 µm <± 0.3 µm
Total Overlay Accuracy <± 0.3 µm <± 0.3 µm
Max. Square Image Format 56.5 x 56.5 / 113 x 113 mm 141.4 x 141.4 mm
System Configuration    
Illuminating System 3500W High Pressure Mercury Arc 10KW High Pressure Mercury Arc
Substrate Up to Gen 3.5 Up to Gen 4.5
Stage Motion/Metering Grid Motor / High Velocity Laser Interferometer Grid Motor / High Velocity Laser Interferometer
Stage Motion/Max. Velocity >300 mm/sec >300 mm/sec


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