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Stepper System Comparison

Azores step-and-repeat photolithography printers address the demanding requirements of the mobile display industry with systems featuring the highest resolution in the industry. Our proven stepper technology optimizes performance capabilities with superior cost-of-ownership in Gen 2 through 4.5 configurations.

  6700 System 8700 System 9200 System
System Configuration      
Substrate Up to Gen 3.5 Up to Gen 3.5 Up to Gen 4.5
Stage Accuracy High Velocity Laser Interferometer High Velocity Laser Interferometer High Velocity Laser Interferometer
Alignment Bright Field
Cross-Based 		Bright Field
Cross-Based		 Bright Field
Cross-Based
Lens Type 8010ghi(i) / 160X1 18709i / 18715i 20015i / 20009i
Reduction Ratio 2x / 1x 1.25x 1.25x
Image Field Diameter 80 mm / 160 mm 187 mm 200 mm
Max. Square Image Format 56.5 x 56.5 /
113 x 113 mm 		132 x 132 mm 141.4 x 141.4 mm
Depth of Focus (DOF) 9 µm / 15 µm 30 µm / 9 µm 9 µm / 15 µm
Minimum Feature 2.5 µm / 5.0 µm L/S 2.5 µm / 1.5 µm L/S 1.5 µm / 2.5 µm L/S


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