Stepper System Comparison
Azores step-and-repeat photolithography printers address the demanding requirements of the mobile display industry with systems featuring the highest resolution in the industry. Our proven stepper technology optimizes performance capabilities with superior cost-of-ownership in Gen 2 through 4.5 configurations.
| |
6700 System |
8700 System |
9200 System |
| System Configuration |
|
|
|
| Substrate |
Up to Gen 3.5 |
Up to Gen 3.5 |
Up to Gen 4.5 |
| Stage Accuracy |
High Velocity Laser Interferometer |
High Velocity Laser Interferometer |
High Velocity Laser Interferometer |
| Alignment |
Bright Field
Cross-Based |
Bright Field
Cross-Based |
Bright Field
Cross-Based |
| Lens Type |
8010ghi(i) / 160X1 |
18709i / 18715i |
20015i / 20009i |
| Reduction Ratio |
2x / 1x |
1.25x |
1.25x |
| Image Field Diameter |
80 mm / 160 mm |
187 mm |
200 mm |
| Max. Square Image Format |
56.5 x 56.5 /
113 x 113 mm |
132 x 132 mm |
141.4 x 141.4 mm |
| Depth of Focus (DOF) |
9 µm / 15 µm |
30 µm / 9 µm |
9 µm / 15 µm |
| Minimum Feature |
2.5 µm / 5.0 µm L/S |
2.5 µm / 1.5 µm L/S |
1.5 µm / 2.5 µm L/S |
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