Stepper System Comparison
Azores steppers address the demanding requirements of the mobile display industry with systems featuring the highest resolution in the industry. Our proven stepper technology optimizes performance capabilities with superior cost-of-ownership in Gen 2 through 4.5 configurations.
| |
6700 System |
9200 System |
| Imaging Specifications |
|
|
| Lens Type |
8010gh(i) / 160X1 |
20015i |
| Resolution |
2.5 µm / 5.0 µm L/S |
1.5µm L/S |
| Degrees of Freedom |
6 DoF reticle chuck |
6 DoF reticle chuck |
| Reduction Ratio |
2x / 1x |
1.25x |
| Image Field Diameter |
80 mm / 160 mm |
200 mm |
| Image Field Stitching Error |
<± 0.3 µm |
<± 0.3 µm |
| Total Overlay Accuracy |
<± 0.3 µm |
<± 0.3 µm |
| Max. Square Image Format |
56.5 x 56.5 / 113 x 113 mm |
141.4 x 141.4 mm |
| System Configuration |
|
|
| Illuminating System |
3500W High Pressure Mercury Arc |
10KW High Pressure Mercury Arc |
| Substrate |
Up to Gen 3.5 |
Up to Gen 4.5 |
| Stage Motion/Metering |
Grid Motor / High Velocity Laser Interferometer |
Grid Motor / High Velocity Laser Interferometer |
| Stage Motion/Max. Velocity |
>300 mm/sec |
>300 mm/sec |
|
