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Press Release

Azores Receives Order for 9200 Photolithography System from Leading X-ray Device Manufacturer


March 28, 2007 - WILMINGTON, MA - Azores Corp recently received an order for a 9200 photolithography system from a leading digital x-ray sensor manufacturer for use in the manufacturing process of the company's large area x-ray detectors for the medical industry. The 9200 was chosen because of the large field and high resolution capability of its lenses, enabling them to meet their additional capacity requirements. Also critical is the system's enhanced depth of focus and +/- 10% critical dimension control.

The Model 9200 PanelPrinter System from Azores Corp provides advanced photolithography for large area substrate applications that require a 1.5 µm resolution. Fully integrated subsystems provide manufacturers with maximum performance and flexibility. They include: a high-fidelity projection lens and illumination system; a precision X-Y stage; an automated substrate alignment system; an automated reticle handling and storage system; and a sophisticated suite of metrology sensors that make it one of the most precise stepper platforms available.

The 9200 low-distortion optics and metrology capabilities also enable stitching applications used for manufacturing x-ray detectors, a process that has been subject to strict and extensive FDA testing. To accomplish this, image field stitching error of ≤±0.5 µm is required.

The 9200 system also features a variety of lenses to meet the needs of active matrix LCD, FED, OLED, and Polysilicon; real-time magnification adjustment via the patented six-degree of freedom reticle chuck for more accurate layer-to-layer registration; and real-time auto-focus measurement and compensation for increased utilization and throughput. Unique large field optics is the ideal combination of high resolution plus exceptional throughput. The system also accommodates a wide range of sizes.

The 9200 offers state-of-the-art metrology, which includes a series of sensors to calibrate and optimize system performance. Sensors include Transmission Alignment (TAS) to detect positioning of the lens grid; Modulation Transfer Function (MTF) to detect lens focus; Illumination Intensity to detect illumination uniformity; and Reflective Alignment (RAS) to detect the position of the alignment system relative to the center of the lens. The sensor package combined with automated calibration routines, enable fast and accurate system tuning, maintaining optimal process conditions and eliminating the need to stop production and run test exposures.


Downloadable File
imageAzores_9200_System_Deliver_PR.pdf

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