8700 PanelPrinter™ The Model 8700 PanelPrinter is a step-and-repeat system designed for Generation 3.5 applications, particularly for flat panel displays for PDAs, cellular phones, digital cameras, and global positioning systems in various markets. Application technologies include: Active matrix liquid crystal display (AMLCD) with amorphous-silicon transistors Low temperature poly-silicon (LTPS) thin film transistor liquid crystal display (TFT-LCD) Organic light-emitting diode (OLED) backplane Field emission display (FED)

Stepper (Step-and-Repeat) Operating Principle

Azores Corp. steppers use projection optics to expose circuit patterns from a mask or reticle onto a substrate to achieve the optimal image fidelity required for mobile display technologies. These photolithography systems employ light from a mercury arc lamp that is projected through a mask, or reticle, containing display and circuit patterns. Substrates are aligned on the system and the mask is imaged through a projection lens to photoresist material coated on the substrate. The substrate is then moved, or stepped, to a second position to expose an adjacent area. Images can be “stitched” together precisely to form larger circuit patterns without any noticeable change in circuit performance. The system repeats the step and exposure process until the entire substrate is patterned.

Once the exposure process has been completed, the substrate is developed with an alkalai solution, such as TMAH or sodium hydroxide (NaOH), to reveal the underlying material. The substrates then continue through the etching, stripping, and deposition processes until multi-layer circuits are completed.

Mobile Display Applications

The Model 8700 addresses the demanding requirements of the mobile display industry. Based on proven Azores stepper technology, the 8700 combines optimized performance capabilities with superior cost-of-ownership in a Gen 3.5 configuration. The photolithography equipment features a resolution of either 1.5 µm or 2.5 µm, with a 187 mm lens. This provides a large lens field and a depth of focus of 9 µm or 30 µm, respectively. The 8700 also features a small footprint of 3.4 x 2.9m, a height of 3.1m, and low-cost reticles for an affordable manufacturing process.

High Resolution Imaging

A high performance projection lens enables high-resolution imaging at 1.5 µm or 2.5 µm under actual manufacturing conditions. A highpower lamp provides an increased illumination intensity. Both image field stitching error and total overlay accuracy are < + 0.3 µm.

For more details on the Model 8700 PanelPrinter, download our product brochure that includes application information, detailed descriptions of Model 8700 subsystem technology, and additional information on important features.

For a detailed comparison of Azores PanelPrinter Systems, click here.

For more information on our other photolithography equipment, please visit our Product Overview page.