	6700 PanelPrinter™ System
	9200 PanelPrinter™ System
	Stepper System Comparison
	Enhancement Options

6700 PanelPrinter™

The Model 6700 PanelPrinter is a step-and-repeat system designed for Generation 3 applications, particularly for flat panel displays for PDAs, cellular phones, digital cameras, and global positioning systems. Application technologies include:

Active matrix liquid crystal display (AMLCD) with amorphous-silicon transistors
Low temperature poly-silicon (LTPS) thin film transistor liquid crystal display (TFT-LCD)
Organic light-emitting diode (OLED) backplane
Field emission display (FED)

Stepper (Step and Repeat) Operating Principle

Azores steppers use projection optics to expose circuit patterns from a mask or reticle onto a substrate to achieve the optimal image fidelity required for mobile display technologies. These systems employ light from a mercury arc lamp that is projected through a mask or reticle containing display and circuit patterns. Substrates are aligned on the system and the mask is imaged through a projection lens to photoresist material display and coated on the substrate. The substrate is then moved, or "stepped", to a second position to expose an adjacent area. Images can be “stitched” together precisely to form larger circuit patterns without any noticeable change in circuit performance. The system repeats the step and exposure process until the entire substrate is patterned.

Once the exposure process has been completed, the substrate is developed with an alkalai solution, such as TMAH or sodium hydroxide (NaOH), to reveal the underlying material. The substrates then continue through the etching, stripping, and deposition processes until multi-layer circuits are completed.

Mobile Display Applications

The Model 6700 addresses the demanding requirements of the mobile display industry. Based on proven Azores stepper technology, the 6700 has been enhanced with optimal throughput and resolution in a Gen 3 configuration. The system is available with either a 160 mm imaging field, providing improved throughput at 5 µm resolution, or an 80 mm imaging field, with resolution down to 2.5 µm.

High Resolution Imaging

A family of high performance projection lenses enable high-resolution imaging as low as 1 µm or up to 5 µm under actual manufacturing conditions. A 3500W lamp provides illumination intensity of as high as 120 mW/cm2. Both image field stitching error and total overlay accuracy are < + 0.5 µm.

For more details on the Model 6700 PanelPrinter, download our product-related literature piece.

6700 Precision Photolithography Brochure: Download a brochure from Azores that includes application information, detailed descriptions of Model 6700 subsystem technology, and additional information on important features.

For a detailed comparison of Azores PanelPrinter Systems, click here.